Medium Size CVD Coating Machine for Parylene Thin Film Production
CX-300 parylene coater is a low temperature CVD coating machine with 300L reactor volume to produce parylene thin films. It is fully automated and incorporates surface activation processes.
The CX-300 can be integrated into electronic or medical device or semiconductor production lines. The machine can easily be coupled to clean rooms.
The CVD Parylene coater is also available in smaller (CX-30) and larger (CX-600) models.
CX-300 was designed by COAT-X for the production of high quality parylene conformal coatings. It is the result of more than 10 years of intense research and development. CX-300 produces high quality pinhole-free parylene conformal coatings from 100 nm to 40 um with very precise deposition rate control.
Parylene thin films produced with CX-300 are excellent moisture barrier coatings and dielectric insulators with high breakdown voltage, low coefficient of friction, excellent biocompatibility and chemical stability.
CX-300 is well adapted for the production of Parylene conformal coatings on printed circuit boards (PCB, PCBA). The large chamber allows coating of large PCBs, up to 50 cm.
MAIN CHARACTERISTICS
CX-300 is a low temperature CVD coating machine specifically designed for the deposition of thin layers of Parylene, it integrates:
Evaporator oven
Pyrolysis furnace with quartz tube
Front loading deposit chamber
Deposit turntable
Injection of adhesion promoter
Cold traps
Pumping units
Control unit
Human Machine Interface Software
PC and screen on adjustable arm
DIMENSIONS
The CX-300 is a compact Parylene enrober, it fits easily into a production line, its size is:
Length 2.5m
Width 1.2m
Height 2.0m
Diameter of working area 600 mm, height 500 mm
AVAILABLE OPTIONS
The following options are available for the CX-300:
Activation of oxygen plasma
PE_CVD module for the deposition of multilayer composite thin films of Parylene and Ceramic.
Automated Nitrogen Refill
Thermo-regulated reactor chamber
Clean room interface
Specific coating device
Consumables for parylene deposition can be purchased through COAT-X, such as Parylene-C, Parylene-VT4 and Parylene-AF4 dimer granules or ceramic precursors.
APPLICATIONS
The CX-300 produces hermetic parylene thin films to protect sensitive products against moisture such as:
Printed circuit boards (PCB and PCBA)
Sensors and actuators
MEMS
LEDs
Medical equipement
Additionally, the thin parylene film provides a biocompatible surface for implantable devices, such as
Cardiovascular stents
Heart monitoring systems
Intraocular pressure control
Intragastric balloon
SERVICES
COAT-X takes care of:
Development of an optimal coating recipe
Design and production of coating fixtures
Supply of consumables and spare parts
FAT and SAT qualifications
Process validation support
Repair and service on demand
Worldwide delivery
