Small size CVD coating machine for the production of Parylene thin films
CX-30 Parylene coater is a low temperature CVD coating machine with 30L reactor volume to produce Parylene thin films. It is fully automated and incorporates surface activation processes.
The CX-30 can be integrated into production lines for electronic or medical devices or semiconductors. The machine can easily be coupled to clean rooms.
The Parylene CVD coater is also available in larger models (CX-300 and CX-600).
Small parylene coater CX-30 by COAT-X for parylene thin films
Small parylene coater CX-30 by COAT-X for parylene thin films
CX-30 was designed by COAT-X for the production of high quality parylene conformal coatings. It is the result of more than 10 years of intense research and development. CX-30 produces high quality, flawless parylene conformal coatings from 100 nm to 40 µm with very precise deposition rate control.
Parylene thin films produced with CX-30 are excellent moisture barrier coatings and dielectric insulators with high breakdown voltage, low coefficient of friction, excellent biocompatibility and chemical stability.
MAIN CHARACTERISTICS
CX-30 is a low temperature CVD coating machine specifically designed for the deposition of thin layers of Parylene, it integrates:
Evaporator oven
Pyrolysis furnace with quartz tube
Front loading deposition chamber
Deposition turntable
Injection of adhesion promoter
Cold traps
Pumping units
Control unit
Human Machine Interface Software
PC and screen on adjustable arm
DIMENSIONS
The CX-30 is a compact Parylene machine, it fits easily into a production line, its size is:
Length 1.9m
Width 0.9m
Height 2.0m
Diameter of working area 200 mm, height 400 mm
AVAILABLE OPTIONS
The following options are available for the CX-30:
Activation of oxygen plasma
PE-CVD module for the deposition of multilayer composite thin films of Parylene and Ceramic.
Automated Nitrogen Refill
Thermo-regulated reactor chamber
Clean room interface
Specific coating device
Consumables for parylene deposition can be purchased at COAT-X, such as parylene-C, parylene-VT4 and parylene-AF4 dimer granules or ceramic precursors.
APPLICATIONS
The CX-30 produces thin hermetic parylene films to protect sensitive products against moisture such as:
Printed circuit boards (PCB and PCBA)
Sensors and actuators
MEMS
LEDs
Medical equipement
Additionally, the thin parylene film provides a biocompatible surface for implantable devices, such as:
Cardiovascular stents
Heart monitoring systems
Intraocular pressure control
Intragastric balloon
SERVICES
COAT-X takes care of:
Development of an optimal deposition recipe
Design and production of fixtures
Supply of consumables and spare parts
FAT and SAT qualifications
Process validation support
Repair and service on demand
Worldwide delivery
