Large size CVD coating machine for the production of Parylene thin films
The CX-600 Parylene coater is low temperature CVD coating machine with a reactor volume of 600L to produce Parylene thin films. It is fully automated and integrates surface activation processes.
CX-600 can be integrated in production lines for electronic or medical devices or semiconductors. The machine can easily be coupled to clean rooms.
The CVD Parylene coater is also available in smaller (CX-30 and CX-300) designs.
Large parylene coater CX-600 by COAT-X for parylene thin films
Large parylene coater CX-600 by COAT-X for parylene thin films
CX-600 has been designed by COAT-X for the production of high quality Parylene conformal coatings. It is the results of more than 10 years of intense research and development. CX-600 produces high quality pinhole-free Parylene conformal coatings from 100 nm up to 40um with very precise control over deposition rate.
Parylene thin films produced with the CX-600 are excellent moisture barrier coatings and dielectric insulators with high breakdown voltage, low coefficient of friction, excellent biocompatibility and chemical stability.
MAIN CHARACTERISTICS
CX-600 is a low temperature CVD coating machine specifically designed for the deposition of Parylene thin films, it integrates:
Evaporator furnace
Pyrolysis oven with quartz tube
Front loading deposition chamber
Deposition turn table
Injection of adhesion promoter
Cold traps
Pump units
Regulation unit
Human Machine Interface Software
PC and screen on adjustable arm
SYSTEM SPECIFICATIONS
The CX-600 is a compact Parylene coater, it can be easily integrated in a production line, its footprint is:
Length 2.3 m
Width 1.6 m
Height 2.0 m
Useful volume for coating process:
Diameter 600 mm
Height 1200 mm
AVAILABLE OPTIONS
Following options are available for the CX-600:
Oxygen plasma activation
PE_CVD module for the deposition of composite multilayer thin films of Parylene and Ceramics.
Automated nitrogen refill
Thermo regulated reactor chamber
Interface to clean room
Specific coating fixture
Consumables for the Parylene deposition can be purchased by COAT-X, like Parylene-C, Parylene-VT4 and Parylene-AF4 dimer granules or ceramic precursors.
APPLICATIONS
The CX-600 produces Parylene hermetic thin films to protect sensitive products against moisture like:
Printed circuit boards (PCB and PCBA)
Sensors and actuators
MEMS
LED’s
Medical devices
In addition Parylene thin film provides biocompatible surface to implantable devices, like
Cardiovascular stents
Heart monitoring systems
Intra-ocular pressure control
Intra-gastric balloon
SERVICES
COAT-X takes care of:
Development of an optimal coating recipe
Design and production of coating fixtures
Supply of consumables and spare parts
FAT and SAT qualification
Support for process validation
On-demand repair and service
Worldwide delivery
